LO series Low Outgassing Cable |
SLO series Super Low Outgassing Cable |
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Application of use | Atmospheric pressure to partial vacuum Low Outgassing Cable(LO) >> |
Ultra-high vacuum environment Super Low Outgassing Cable(SLO) >> |
Applications | - DUV lithography equipment for semiconductor and FPD manufacturing - Satellites and other space equipment |
- EUV lithography equipment for semiconductor manufacturing - SEM - Mask inspection equipment and mask lithography equipment for semiconductor manufacturing - Satellites and other space equipment |